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Links and Literature

Microelectronics Education: http://www.uni-duisburg-essen.de/ebs/
Freely available semiconductor software: http://www.uni-duisburg-essen.de/ebs/software_en.shtml
Microelectronics Research: http://www.ims.fraunhofer.de
Home of the former simulator engine: http://www.systemc.org
Bibliography: http://www.jkrconsult.com/qbib.htm
http://www.jkrconsult.com/capbib.htm
Literature: H. Vogt: "Discrete-Event Simulation using SystemC: Interactive Semiconductor Factory Modeling with FabSim". In: Proceedings of the 2003 Winter Simulation Conference, ed. S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, pp. 1383-1387. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers. Available online via http://www.informs-sim.org/wsc03papers/174.pdf
H. Vogt: "A new Method to Determine the Tool Count of a Semiconductor Factory Using FabSim". In: Proceedings of the 2004 Winter Simulation Conference, eds. R. G. Ingalls, M. D. Rossetti, J. S. Smith, and B. A. Peters, pp. 1925-1929. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers. Available online via http://www.informs-sim.org/wsc04papers/256.pdf
W. J. Hopp, M. L. Spearman: "Factory Physics", second ed., McGraw Hill, Boston, 2000
G. S. Fishman: "Discrete-event simulation", Springer, New York, 2001
A. M. Law and W. D. Kelton: "Simulation Modeling and Analysis", McGraw-Hill, Boston, 2000
J. Banks, editor: "Handbook of simulation", Wiley, New York, 1998
T. Grötker, S. Liao, G. Martin, S. Swan: "System design with SystemC", Kluwer, Boston, 2002
M. Pinedo: "Scheduling", Prentice Hall, New Jersey, 2002
Conferences: ASMC (Advanced semiconductor manufacturing conference) http://www.semi.org/en/EventsTradeshows/CTR_040396
WSC (Winter simulation conference) http://www.wintersim.org/
ISSM (International Symposium on Semiconductor Manufacturing) http://www.issm.com/