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Holger Vogt holds a diploma degree in electrical engineering. His dissertation dealt with CMOS on buried nitride, a new SOI technology. Since 1985 he is with Fraunhofer Institute of Microelectronic Circuits and Systems, Duisburg, Germany. He has managed the CMOS pilot line at IMS. Currently he is responsible for R&D on innovative processes and devices, including smart sensors and power devices and the program to set up 0.25µm technology at IMS. Since 1997 his is also professor at the EE&CS department of Gerhard-Mercator-University at Duisburg, Germany, teaching semiconductor technology and packaging.